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Upgrades
Over the years IDL has developed upgrades for lithography systems to increase
through-put, and yield resulting in many satisfied customers.
PE200/300
- Mask and wafer transport upgrade from bushings to bearings
- Flipper assembly upgrade from bushings to bearings
- High vacuum relief finger seal
- High vacuum relief chuck assembly
- Pre-aligner modification
- Linear drive flexure mod
- PE200/300 Front panel upgrade
- Video viewing system
PE500/600/700
- A300/A800/A900/ View stop manifold upgrade
- A300 PE500 -002 Manifold
- PE500 -002 Sensor PCB
- Digital precision helium regulator assembly
- Secondary protector regulator kit
- Binocular head upgrade
- Two step chuck (3”,4”,5”,6”)
- Carousel, load arm, input/output thick wafer upgrade
- Mask & wafer "X" flexure
- Gauge head, anchor flexure and center flexure to bearing upgrades
- Aims display and windows based software upgrade
- Keyboard modification for through-track systems ergonomics
- PE200/300/500/600/700 adjustable viewing binocular head
- Video viewing system
- PE500/600/700 Keyboard upgrade
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